| Titre : |
Fundamentals of microfabrication and nanotechnology : manufacturing techniques and applications |
| Type de document : |
texte imprimé |
| Auteurs : |
Marc J Madou, Auteur |
| Mention d'édition : |
3rd ed |
| Editeur : |
Boca Raton : CRC press |
| Année de publication : |
cop. 2012 |
| Importance : |
1 vol. (XIII-636 p.) |
| Présentation : |
ill |
| Format : |
29 cm |
| ISBN/ISSN/EAN : |
978-1-4200-5516-0 |
| Langues : |
Anglais (eng) Langues originales : Anglais (eng) |
| Catégories : |
BioMEMS
Nanoelectromechanical systems
Nanotechnologie
|
| Résumé : |
"In Part I we compare available manufacturing options for MEMS and NEMS, introduce inspection options for the produced parts (metrology) and summarize available modeling software for MEMS and NEMS. Of the three Chapters in Part II, the first deals with scaling laws, the second with actuators, and the third discusses issues surrounding power generation and the implementation of brains in miniaturized devices. In Part III , Chapter 10 we review the MEMS and NEMS markets"-- |
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Fundamentals of microfabrication and nanotechnology : manufacturing techniques and applications [texte imprimé] / Marc J Madou, Auteur . - 3rd ed . - Boca Raton : CRC press, cop. 2012 . - 1 vol. (XIII-636 p.) : ill ; 29 cm. ISBN : 978-1-4200-5516-0 Langues : Anglais ( eng) Langues originales : Anglais ( eng)
| Catégories : |
BioMEMS
Nanoelectromechanical systems
Nanotechnologie
|
| Résumé : |
"In Part I we compare available manufacturing options for MEMS and NEMS, introduce inspection options for the produced parts (metrology) and summarize available modeling software for MEMS and NEMS. Of the three Chapters in Part II, the first deals with scaling laws, the second with actuators, and the third discusses issues surrounding power generation and the implementation of brains in miniaturized devices. In Part III , Chapter 10 we review the MEMS and NEMS markets"-- |
| Permalink : |
./index.php?lvl=notice_display&id=21558 |
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